Conte Nanotechnology Cleanroom Lab

For more information: http://nano.pse.umass.edu/
1,400 sq. ft. Class 1000 clean room (Conte B-132)

Metallization

Deposition and Etch

  • Deposition of Si, SiO2, Si3N4, amorphous Si
  • Etching of Si and derivatives, resists, IT, etc.

Lithography

Wet Chemistry

  • Acid etch
  • Solvent rinse
  • Wafer cleaning
  • Electroplating

Metrology

Conte Nanotechnology Cleanroom flooplan

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