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        Conte Nanotechnology Cleanroom Lab

        For more information: http://nano.pse.umass.edu/
        1,400 sq. ft. Class 1000 clean room (Conte B-132)

        Metallization

        Deposition and Etch

        • Deposition of Si, SiO2, Si3N4, amorphous Si
        • Etching of Si and derivatives, resists, IT, etc.

        Lithography

        Wet Chemistry

        • Acid etch
        • Solvent rinse
        • Wafer cleaning
        • Electroplating

        Metrology

        Conte Nanotechnology Cleanroom flooplan

        手机提现牛牛软件